摘要 |
<P>PROBLEM TO BE SOLVED: To prevent breakage of a multilayer substrate even when a liquid is expanded by freezing. <P>SOLUTION: A slit 121 is formed in a thin plate 102, and the slit 121 is sealed by bonding the thin plate 102 to a thin plate 101 and a thin plate 103 while being held between them. An elastic film 104 is held between the thin plate 102 and the thin plate 103. The elastic film 104 is bent in the slit 121, and the bent part 141 is protruded to the slit 121. The internal space of the slit 121 is divided into two upper and lower areas 122 and 123 by the elastic film 104. One area 122 is a flow passage for carrying water. The other area 123 is filled with a gas such as air. <P>COPYRIGHT: (C)2010,JPO&INPIT |