| 摘要 |
PROBLEM TO BE SOLVED: To provide a detection device with improved detection accuracy of the surface state of a detection object, even when the transmission of a transmission body on the optical path of detection light changes. SOLUTION: The detection device includes a light-emitting part which emits the detection light toward the detection object, the transmission body which is provided on the optical path of the detection light emitted from a light-emitting part and through which the detection light is transmitted; a light-receiving part which receives the first detection light and second detection light with different properties from each other out of the detection light which has been reflected by the detection object and has passed through the transmission body; and a detection means which detects the surface state of the detection object based on the relative value of the light-receiving quantity of the first detection light and the second detection light received on the light-receiving part. This detection device can improve the detection accuracy of the surface state of the detection object, even when the transmission of the transmission object on the optical path of the detection light changes, as compared with the case where this structure is not adopted. COPYRIGHT: (C)2010,JPO&INPIT
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