| 摘要 |
A method for cleaning a high resolution electron microscope sample with a low power ion beam includes the following steps. One sample is transmitted to a dual beam system to perform the milling operation. The sample includes at least one cross-sectional area. The cross-sectional area includes a plurality of active areas (AA), a plurality of gates, and a plurality of gate oxides (GOx). During the milling process, re-deposition is generated, and the re-deposition covers the active area of the cross-sectional area and the gate oxide in the middle of the gate. An ion beam is applied to the cross-sectional area to remove the re-deposition. An oxide etching operation is performed to the surface of the cross-sectional area to generate surface topography. A high resolution scanning electron microscope is used to obtain an image from the cross-sectional area. The active area and the gate oxide are checked and analyzed.
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