| 摘要 |
A liquid sending method comprises the steps of sending a coating solution to a liquid sending pipe, passing the coating solution to an orifice which is provided at a part of the liquid sending pipe to prevent a vibration propagation and passing the coating solution to a pulsation absorb device which is provided at a part of the liquid sending pipe where is located at a downstream of the orifice, wherein the pulsation absorb device includes a first chamber that a liquid can flow in and out, a second chamber which is introduced a gas, and a diaphragm which separates the first chamber and the second chamber.
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