| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for producing a fine crystal grain copper material which can produce a fine crystal grain copper material made of high purity copper or a low concentration copper alloy at low cost, in which crystal grains are refined, and which is thermally stable, to provide a fine crystal grain copper material produced by the production method, and to provide a sputtering target composed of the fine crystal grain copper material. <P>SOLUTION: In the method for producing the fine crystal grain copper material where a copper stock 1 made of high purity copper or a low concentration copper alloy is subjected to multi-axes forging treatment of performing compression working from different directions, respectively, and a copper material in which crystal grains are refined is produced, the initial working temperature T1 at which the first compression working in the multi-axes forging is performed is a temperature in which dynamic recrystallization is at least partially generated in the copper stock 1. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
