| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a drawing apparatus capable of acquiring an appropriate soaking time. Ž<P>SOLUTION: The drawing apparatus 100 comprises: a drawing chamber 103, wherein an evaluation substrate 101 with a plurality of marks 10 formed there is disposed; a measuring amplifier 214 that measures the position of a plurality of marks 10 inside the drawing chamber 103; a coefficient calculating section 114 that calculates the coefficient of an approximate expression that approximates a positional deviation amount of a plurality of marks, by using the position of a plurality of measured marks; and a determination section 116, that determines as to whether a size variation of an evaluation substrate 101 is less than a threshold, by using coefficients calculated the last time and this time. Until the size variation of the evaluation substrate 101 becomes less than the threshold, standby time is arranged each time prior to measurement for the measurement of a plurality of mark positions from the second time forward, and the measurement of a plurality of mark positions, the calculation and determination of coefficients are preformed repeatedly. Accordingly, it is possible to acquire appropriate soaking time. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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