发明名称 Semiconductor Device and Method of Forming a Wafer Level Package with Bump Interconnection
摘要 A semiconductor device is made by providing a metal substrate for supporting the semiconductor device. Solder bumps are connected to the substrate. In one embodiment, a conductive material is deposited over the substrate and is reflowed to form the solder bumps. A semiconductor die is mounted to the substrate using a die attach adhesive. The semiconductor die has a plurality of contact pads formed over a surface of the semiconductor die. An encapsulant material is deposited over the solder bumps and the semiconductor die. The encapsulant is etched to expose the contact pads of the semiconductor die. A first redistribution layer (RDL) is formed over the encapsulant to connect each contact pad of the semiconductor die to one of the solder bumps. The substrate is removed to expose the die attach adhesive and a bottom surface of the solder bumps.
申请公布号 US2010072618(A1) 申请公布日期 2010.03.25
申请号 US20080235000 申请日期 2008.09.22
申请人 STATS CHIPPAC, LTD. 发明人 CAMACHO ZIGMUND R.;TAY LIONEL CHIEN HUI;BATHAN HENRY D.;PUNZALAN JEFFREY D.
分类号 H01L23/52;H01L21/00 主分类号 H01L23/52
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