| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve a problem wherein, in a method for inspecting a substrate having an optical surface, since a method for properly inspecting the surface of a substrate especially duplicated from a primary standard or master is not developed, the mass production of a highly densified recording medium or optical element is delayed. Ž<P>SOLUTION: By constructing a Michelson interferometer or Mach-Zehnder interferometer constituted so that the primary standard or master and the substrate duplicated from the same may serve respectively as reflecting mirrors, the light containing phase data reflected from the primary standard or master and the light reflected from an inspection target interfere with each other to observe an interference fringe. By analyzing the interference fringe, the difference between the specific optical structure possessed by the surface of the primary standard or master, and the surface structure of the inspection target is observed and the surface state of the inspection target is detected. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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