| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a slide unit that facilitates setting a stop position of a slide table with high accuracy. Ž<P>SOLUTION: The slide table 4 is movably mounted on a stage 2, and mechanical valves 12A to 12D are provided, corresponding to the stop positions S1 to S4 of the slide table 4. The mechanical valve allows the passage of a pneumatic pressure supplied by a contactor C of the mechanical valve in contact with the moving slide table 4. A table stop mechanism 6 is actuated by using the pneumatic pressure passing through the mechanical valve to stop the slide table 4 at a prescribed position. Accordingly, by presetting the relative positional relationship between the mechanical valves and the table stop mechanism at the design stage, the stop position of the slide table is precisely determined by only mechanically assembling the mechanical valves and the table stop mechanism. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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