| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an etchant composition of an organic light emitting diode display device. <P>SOLUTION: This etchant composition contains 0.1-34 mass% of ammonium peroxydisulfate acid ((NH<SB>4</SB>)<SB>2</SB>S<SB>2</SB>O<SB>8</SB>), 0.1-9 mass% of a nitric acid-based compound, 0.1-10 mass% of an acetic acid-based compound, 0.2-5 mass% of a fluoride-based compound, 0.01-3 mass% of a boron-based compound, and 39-73 mass% of water, but contains no azole-based compound. Thereby, since the etchant composition contains no hydrogen peroxide, stability and a margin on a process can be secured, and an excellent taper etching profile can be obtained. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
