| 摘要 |
PROBLEM TO BE SOLVED: To provide a grinder including a chuck table having a simple construction. SOLUTION: The grinder includes the chuck table 52 for holding a wafer, and a wafer transfer means for loading a wafer to be ground into the chuck table 52 and unloading the ground wafer. The chuck table 52 includes: a suck-holding part 56 for sucking and holding a wafer; a frame body 54 for surrounding the suck-holding part 56; a table base 58 for rotatably supporting the frame body 54; a communication passage 110 formed along the outer periphery of the frame body 54 and communicated to the suck-holding part 56; and an open/close valve 92 that is disposed within the communication passage 110 and switches the communication passage 110 between an open state and a close state. The wafer transfer means includes a suction force transmission part that is engaged with the communication passage 110 and transmits suction force when a suction pad abuts against the suck-holding part 56, and a fluid supply part that causes the wafer to be released from the suck-holding part 56 by supplying a fluid to the suck-holding part 56. COPYRIGHT: (C)2010,JPO&INPIT
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