| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe unit and an inspecting apparatus, capable of bringing a pitch between probes to be made narrow and small. SOLUTION: The probe unit includes a holding section 12 for holding a plurality of probes 11. The holding section 12 includes: a hold plate 31 in which an insertion hole 41 is formed; a hold plate 32 in which an insertion hole 42 is formed, and which is arranged slidably in a first direction parallel to the hold plate 31; and a hold plate 33 in which an insertion hole 43 is formed, and which is arranged between the hold plate 31 and the hold plate 32 slidably in a second direction reverse to the first direction. The pair of probes 11 which adjoin each other, are held in elastically deformed fashions such that the pitch of respective distal ends 11a is narrower than that of the insertion holes 41 by bringing the hold plates 32, 33 to slide in the first and second directions, respectively, while their distal end 11a sides are inserted into the pair of insertion holes 41, respectively, and their proximal end 11b sides are inserted into one insertion hole 42 and one insertion hole 43, respectively. COPYRIGHT: (C)2010,JPO&INPIT
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