发明名称 METHODS AND STRUCTURES FOR ALTERING STRAIN IN III-NITRIDE MATERIALS
摘要 Methods and structures for producing semiconductor materials, substrates and devices with improved characteristics are disclosed. Structures and methods for forming reduced strain structures include forming an interface between a support structure surface and a strained semiconductor layer. The support structure is selectively etched to form a plurality of semiconductor islands with reduced levels of strain.
申请公布号 US2010072576(A1) 申请公布日期 2010.03.25
申请号 US20090563327 申请日期 2009.09.21
申请人 ARENA CHANTAL 发明人 ARENA CHANTAL
分类号 H01L29/20;H01L21/18 主分类号 H01L29/20
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