| 摘要 |
<p>PURPOSE: A substrate processing apparatus is provided to reduce a substrate transfer time by carrying a substrate which is not processed to an overlap holding unit. CONSTITUTION: A substrate processing apparatus(1) includes a substrate integration unit, a substrate process unit, a substrate exchange unit(50), a first transfer unit, and a second transfer unit. The substrate integration unit integrates a substrate which is not processed with the completely processed substrate. The substrate process unit processes the substrate(W). The substrate exchange unit exchanges the substrate between the substrate integration unit and the substrate process unit. The first transfer unit transfers N substrates at the same time. The second transfer unit transfers the substrate between the substrate exchange unit and the substrate process unit. The substrate exchange unit includes a transfer holding unit.</p> |
