| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electron emitting cathode, capable of attaining a high luminance due to low electron affinity while sufficiently ensuring heat radiation performance, and reducing the energy width by reducing heating temperature, to provide an electron microscope, and to provide an electron beam exposing machine provided with the electron emitting cathode. <P>SOLUTION: The electron emitting cathode 91 which emits electrons by applying voltage between it and an extracting electrode includes a body part 96, and a tapered sharp-pointed part 97 protruded from the body part 96. The body part 96 and the sharp-pointed part 97 are formed of diamond single crystal. An n-type AlGaN layer 98 including donor impurity which is represented by Al<SB>x</SB>Ga<SB>1-x</SB>N (0≤x≤1) is formed on the surface of the sharp-pointed part 97. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
