| 摘要 |
An automatic wafer storage system and a method of controlling the system are disclosed. The automatic wafer storage system includes an analysis module and a storage unit. The analysis module estimates the locations between an idle equipment, a transport tool, and the storage unit, so as to control the storage unit and the transport tool to move to the best location for the transport tool to receive wafers from the storage unit. After that, the transport tool carries the wafers to the idle equipment for processing.
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