CRYSTALLINE TRANSPARENT CONDUCTIVE THIN FILM, METHOD OF PRODUCING THE SAME, TRANSPARENT CONDUCTIVE FILM, AND TOUCH PANEL

摘要

A crystalline transparent conductive thin film has, as main ingredient, indium tin oxide containing tin oxide by a rate of 9 wt% or less to the total of indium oxide and tin oxide. The crystalline transparent conductive thin film contains nitrogen by a rate of 0.45 atom% or less. The crystalline transparent conductive thin film has a high resistivity and excellent reliability in a high temperature and high humidity environment.