SEMICONDUCTOR DEVICE INCLUDING RESISTANCE ELEMENT

摘要

PURPOSE: A semiconductor device including a resistance element is provided to improve reliability of the resistance element by suppressing the variation of resistance values of the resistance element. CONSTITUTION: A resistance element includes a first conductive layer, a second insulation layer, a second conductive layer, a first connection unit(EI2) and a plurality of contact plugs(CP8,CP9,CP10,CP11). The first conductive layer is formed on the semiconductor substrate by interposing the first insulation layer. The second insulation layer is formed on the first conductive layer. The second conductive layer is formed on the second insulation layer. The first connection unit connects the first conductive layer and the second conductive layer. A contact plug is formed on the second conductive layer. The upper side of the connection unit is interposed between the contact plugs.