| 发明名称 |
APERTURE STOP, OPTICAL SYSTEM, EXPOSURE APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD |
| 摘要 |
<p>A pupil surface of an optical system or a surface adjacent to the pupil surface is provided with an aperture stop plate (12) which defines a luminous flux (11). An aperture (121) formed on the aperture stop plate (12) has a three-dimensional shape which corresponds to an optimum pupil shape of the optical system.</p> |
| 申请公布号 |
WO2010032753(A1) |
申请公布日期 |
2010.03.25 |
| 申请号 |
WO2009JP66168 |
申请日期 |
2009.09.16 |
| 申请人 |
NIKON CORPORATION;SHIRAISHI, MASAYUKI;ONO, TAKURO |
发明人 |
SHIRAISHI, MASAYUKI;ONO, TAKURO |
| 分类号 |
G02B17/00;G02B13/14;G02B13/18;G02B13/24;G03F7/20;H01L21/027 |
主分类号 |
G02B17/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
