| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a transfer device which has an enhanced throughput and can be improved in positioning accuracy when required. <P>SOLUTION: The transfer device includes: a primary part P; at least a first and a second secondary part S1 and S2, which are each magnetically coupled to the primary part P for drive purposes; and a control device for drive controlling the secondary parts. The control device can control the drive of the first secondary part S1 in the first range P1 of the primary part P in accordance with a first control rule, and can control the drive of the second secondary part S2 in a second range P2 of the primary part P in accordance with a second control rule. A boundary GR which separates the first range P1 from the second range P2 can be dynamically changed with the control device. A driving method corresponding thereto is further provided. The interval between the secondary parts S1 and S2 is reduced by the dynamic change of the ranges P1 and P2, to enhance the throughput. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
