| 摘要 |
PROBLEM TO BE SOLVED: To provide a suction holding hand capable of suction-holding a workpiece in a non-contact manner even though a suction-held surface of the workpiece is not flat. SOLUTION: The suction holding hand includes: a plurality of chuck units 2 each comprising a Bernoulli chuck for suction-holding a lens L in a non-contact manner and a chuck suspending portion 71 holding the Bernoulli chuck downward; a unit head holding the plurality of unit chucks 2 each freely swingable in a downward state; and gas supply flow passages 62, 87, 88 with their downstream end connected to a plurality of Bernoulli chucks and their upstream end connected to a gas supply source to supply gas to the plurality of Bernoulli chucks. COPYRIGHT: (C)2010,JPO&INPIT |
