发明名称 ELECTRON MICROSCOPE
摘要 <P>PROBLEM TO BE SOLVED: To provide an electron microscope capable of accurately positioning cursors at an edge of a testpiece image and calculating a dimension between two cursors. Ž<P>SOLUTION: The electron microscope comprises a display for displaying an image of a testpiece and a computer displaying the cursors for measuring dimensions by overlapping the cursors on the image of the testpiece. The computer calculates a distance between the cursors by moving the cursors to a desired position of the image of the testpiece displayed on the display, and displays the distance on the display. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010067373(A) 申请公布日期 2010.03.25
申请号 JP20080230397 申请日期 2008.09.09
申请人 HITACHI HIGH-TECHNOLOGIES CORP 发明人 YAMAGUCHI KOHEI
分类号 H01J37/28;G01B15/00;H01J37/22 主分类号 H01J37/28
代理机构 代理人
主权项
地址