| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing an optical waveguide device, which can suppress the surface roughening of core side surfaces of an optical waveguide when the optical waveguide is formed on a roughened surface of a substrate. SOLUTION: An under cladding layer 2 is formed on the roughened surface of a substrate 1 made of a material that absorbs irradiation light L, and then a photosensitive resin layer 3A for the formation of cores 3 is formed thereon. Irradiation light L is irradiated toward this photosensitive resin layer 3A to expose the photosensitive resin layer 3A in a predetermined pattern, the exposed parts are formed on the core 3. When the irradiation light L transmitted through the photosensitive resin layer 3A for the formation of the cores 3 and the under cladding layer 2 reaches the surface of the substrate in the formation process of cores 3, the irradiation light is absorbed by the substrate 1, so that there is little irradiation light L reflected from the surface of the substrate 1. Accordingly, the surface roughening of core 3 side is effectively suppressed by substantially reducing the irradiation light L reaching the photosensitive resin layer 3A by random reflection on the surface of the substrate 1. COPYRIGHT: (C)2010,JPO&INPIT |
