| 摘要 |
PROBLEM TO BE SOLVED: To provide a screening apparatus, which enables a miniaturization of the external form of the apparatus, and has little installation floor area. SOLUTION: The screening apparatus houses a target (W) sectioned along certain standards preliminarily given to the corresponding tray among a plurality of trays (51) corresponding to the segmentation. The screening apparatus comprises an inlet port (IN) in which the sectioned target is carried, and a plurality of trays, arranged respectively substantially on the same circumference, and a rotating arm part (40) arranged at the central part of the circle, having a plurality of arms (42) provided with a holding part (43) which is able to hold the target at the end, on the outer circumference of a rotary shaft part (41), and being able to rotate in a state holding the target by the arm. By a lifting movement of the whole rotating arm part, the target carried in the inlet port is held by the arm, and the target held by the arm is carried from the inlet port up to the tray corresponding to the segmentation of the target by the rotation of the rotating arm part. COPYRIGHT: (C)2010,JPO&INPIT
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