| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a ceramic green sheet peeling device capable of preventing the distortion of a support film and sufficiently peeling a ceramic green sheet from the support film. Ž<P>SOLUTION: The peeling device 10 includes: a holding table 18 having a holding surface 18a; a suction part 20 for sucking the support film F on the holding surface 18a; a supply roller 12 for supplying the support film F; a tension roller 28 on which the support film F located on the downstream side of the holding table 18 is stretched to be laid; a take-up roller 14 for taking up the support film F guided via the tension roller 28; a differential pressure cylinder 32 that operates the tension roller 28; a suction conveying part 24 that can suck cut pieces S1 on the holding surface 18a; a motor 26 for moving the suction conveying part 24; and a control part 36 that controls to operate a motor 16 connected to the take-up roller 14, the suction part 20, the suction conveying part 24, the differential pressure cylinder 32 and the motor 26. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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