STATIC PRESSURE GAS BEARING DEVICE PARTICULARLY FOR VACUUM USE AND RELATED ELECTROSTATIC PRE-LOAD UNIT

摘要

PROBLEM TO BE SOLVED: To provide a static pressure gas bearing device provided with a pre-load particularly for electron beam lithography by a simple design and imparting any negative impact on an electron beam in a static pressure gas device unnecessary for a supplementary weight and highly pre-loaded. SOLUTION: The proposed static pressure gas bearing device for moving an apparatus on a base structure particularly in a vacuum environment has at least one static pressure bearing element composed by including a bearing body having a load burden area and a suction area. An electrostatic pre-load unit having at least one electrode is solved by the static pressure gas bearing device which is associated with at least one static pressure gas bearing element and also is added with a voltage so as to generate a force element in a direction of the perpendicular face of the bearing body of the static pressure bearing element. COPYRIGHT: (C)2010,JPO&INPIT