| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of accurately manufacturing an optical waveguide having high accuracy and a high accumulation only by a lithography technique. SOLUTION: The method of manufacturing the optical waveguide 1 comprising cores 4 on which light input and output faces 2, 3 are formed in a diagonal shape and a clad 5 includes: a step in which a plurality of rectangular pattern openings 12 corresponding to the cores 4 are arranged side by side on a mask 13 used for exposure of a photosensitive material used for forming the cores 4; a step in which a plurality of exposures are repeated while moving the exposing position of the mask 13 with respect to the photosensitive material in the longitudinal direction of the cores 4 to make an exposed pattern corresponding to the diagonal face shape of the light input and output faces; a step in which a molding mold is manufactured by etching a mold material placed under the photosensitive material mask obtained by developing the multiply exposed photosensitive material; and a step in which the cores are formed by using the molding mold. COPYRIGHT: (C)2010,JPO&INPIT |
