| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an apparatus for imparting tension to a vapor-deposition mask, which can fix the vapor-deposition mask that is a metallic thin sheet onto a mask frame, while imparting a stable tension to the vapor-deposition mask. Ž<P>SOLUTION: The vapor-deposition mask 1 formed of the metallic thin sheet is mounted on the mask frame 2 and the tension is imparted therein by a spring 10 which grips the periphery of the vapor deposition mask 1 with a clamper 5. In this state, the vapor-deposition mask 1 is fixed on the mask frame 2 with a method such as adhesion, and is used in the film formation of an organic EL element and the like. The clamper 5 includes a fixing piece 6 and a movable piece 7 and has a roughened surface layer 8 for enhancing a friction force with respect to the vapor deposition mask 1 formed on at least one side of a gripping part with the thermal spray of a material having high hardness such as tungsten carbide. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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