| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an atmosphere heat treatment method capable of improving the treatment efficiency by detecting an abnormal layer in real-time during the atmosphere heat treatment, and to provide an atmosphere heat treatment apparatus. Ž<P>SOLUTION: The atmosphere heat treatment method is carried out by heating a workpiece W placed inside a heat treatment furnace 11, and the atmosphere heat treatment is carried out by repeating the following steps: an intrusion step of allowing an element to intrude through the surface of the workpiece W into the inner part by introducing an atmosphere gas to the heat treatment furnace 11; a detection step of measuring an emissivity of the workpiece W surface with a radiation thermometer 21 and detecting generation of an abnormal layer on the workpiece W surface through an abnormal layer detector 22; and a diffusion step of diffusing the element into the inner part of the workpiece W by introducing an inert gas into the heat treatment furnace 11 and discharging the atmosphere gas from the heat treatment furnace 11, when generation of an abnormal layer is detected in the above detection step. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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