| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an abrasive cloth adapted to improve the flatness of an object to be polished by suppressing clogging while ensuring the retainability of a polishing fluid. <P>SOLUTION: The abrasive cloth includes a textile sheet 2 having a polishing surface P for polishing an object to be polished. The textile sheet 2 is formed by a plain weave structure of horizontal threads 7a and vertical threads 7b each using an elastic thread 7. A clearance 3 is formed between the horizontal thread 7a and the vertical thread 7b. A multifilament as a bundle of monofilaments containing polyurethane and acetyl cellulose is used as the elastic thread 7. In the monofilament forming the elastic thread 7, the extension modulus during 1.2 times extension is adjusted to the range of 0.03-0.5 cN/Dtex. Irregularities owing to the plain weave structure are substantially uniformly formed on the polishing surface P, and the clearance 3 is continuously formed. <P>COPYRIGHT: (C)2010,JPO&INPIT |
