| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an actuator using a piezoelectric element and a method of driving the actuator. <P>SOLUTION: The actuator includes at least one piezoelectric cell which is displaced by an input voltage, and at least one piezoelectric sensor for sensing the displacement of the piezoelectric cell, and embodies micromirror driving and sensing. <P>COPYRIGHT: (C)2010,JPO&INPIT |
