| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce an error in a pattern correction value even when a length of a portion where patterns overlap is changed. <P>SOLUTION: A processor 1 sets a pattern as a correction object from a pattern data D1, obtains an overlapped length between a line segment on the correction object pattern and a side of a pattern adjoining to the line segment, extracts a bias corresponding to the interval between the line segment on the correction object pattern and the adjoining pattern by referring to a correction table D2, and calculates a correction value for the line segment by correcting the bias on the basis of the overlapped length between the line segment on the correction object pattern and the adjoining pattern. <P>COPYRIGHT: (C)2010,JPO&INPIT |
