SEMICONDUCTOR DEVICE, METHOD FOR MANUFACTURING THE SAME, AND DATA PROCESSING SYSTEM

摘要

Modification of an SOD film is promoted in a hot oxidizing atmosphere. Elements under a liner film and a semiconductor substrate are prevented from being damaged by oxidation. A semiconductor device includes a recess portion, a first liner film and a second liner film sequentially formed on inner wall side surfaces of the recess portion, the second liner film containing an oxygen atom, and an insulating region filled in the recess portion. The first liner film has a higher oxidation resistance than the second liner film.