| 摘要 |
The present invention provides a plasma generating system that includes a nozzle and a gas flow tube. The nozzle includes a housing having a cavity formed therein, where the cavity forms a gas flow passageway, and a rod-shaped conductor disposed in the cavity and operative to transmit microwave energy along the surface thereof so that the microwave energy excites gas flowing through the cavity. The gas flow tube is disposed in a chamber containing an excitation energy and having an inlet disposed at a downstream end of the gas flow passageway so that the gas exiting the cavity flows through the gas flow tube and is excited by the excitation energy.
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