METHODS FOR ELECTRON-BEAM INDUCED DEPOSITION OF MATERIAL INSIDE ENERGETIC-BEAM MICROSCOPES

摘要

We disclose methods for materials deposition on a surface (120) inside an energetic-beam instrument, where the energetic-beam instrument is provided with a laser beam (170), an electron beam (100), and a source (130) of precursor gas (150). The electron beam (100) is focused on the surface (120), and the laser beam (170) is focused to a focal point (190) that is at a distance (200) above the surface (120) of about 5 microns to one mm, preferably from 5 to 50 microns. The focal point (190) of the laser beam (170) will thus be within the stream of precursor gas (150) injected at the sample surface (120), so that the laser beam (170) will facilitate reactions in this gas cloud with less heating of the surface (120).