发明名称 |
Double-gate transistor structure equipped with a channel with several branches |
摘要 |
The device has a finFET double gate transistor structure with semi-conductor bars (106-1, 106-2) that connect blocks forming source and drain regions of a transistor. Gate electrodes (152, 154) are situated on sides of the structure. An insulation spacer (140a) situated between the bars separates the electrodes. The bars have a critical dimension (Wsi), whose ratio with a critical dimension of the spacers confer a drain Induced Barrier lowering (DIBL) factor less than that of preset maximum DIBL threshold or a coupling between the electrodes greater than preset minimum coupling, to the device. An independent claim is also included for a method for forming a microelectronic double-gate transistor device. |
申请公布号 |
EP2043141(A3) |
申请公布日期 |
2010.03.24 |
申请号 |
EP20080165240 |
申请日期 |
2008.09.26 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE;INSTITUT NATIONAL POLYTECHNIQUE DE GRENOBLE |
发明人 |
ERNST, THOMAS;DUPRE, CECILIA |
分类号 |
H01L21/336;H01L29/786 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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