发明名称 Double-gate transistor structure equipped with a channel with several branches
摘要 The device has a finFET double gate transistor structure with semi-conductor bars (106-1, 106-2) that connect blocks forming source and drain regions of a transistor. Gate electrodes (152, 154) are situated on sides of the structure. An insulation spacer (140a) situated between the bars separates the electrodes. The bars have a critical dimension (Wsi), whose ratio with a critical dimension of the spacers confer a drain Induced Barrier lowering (DIBL) factor less than that of preset maximum DIBL threshold or a coupling between the electrodes greater than preset minimum coupling, to the device. An independent claim is also included for a method for forming a microelectronic double-gate transistor device.
申请公布号 EP2043141(A3) 申请公布日期 2010.03.24
申请号 EP20080165240 申请日期 2008.09.26
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE;INSTITUT NATIONAL POLYTECHNIQUE DE GRENOBLE 发明人 ERNST, THOMAS;DUPRE, CECILIA
分类号 H01L21/336;H01L29/786 主分类号 H01L21/336
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