发明名称 MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT
摘要 A micromechanical component includes a substrate that has a front side and a backside, the front side having a functional pattern, which functional pattern is electrically contacted to the backside in a contact region. The substrate has at least one contact hole in the contact region, which extends into the substrate, starting from the backside.
申请公布号 EP2164801(A2) 申请公布日期 2010.03.24
申请号 EP20080759997 申请日期 2008.05.26
申请人 ROBERT BOSCH GMBH 发明人 SCHMOLLNGRUBER, PETER;ARTMANN, HANS;WAGNER, THOMAS
分类号 B81B7/00 主分类号 B81B7/00
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