Miniature pressure transducer with elongate base wafer and operable at high temperatures

摘要

A miniature pressure transducer (1) is disclosed which is able to operate at high temperatures. The pressure transducer is provided on a substrate (10) comprising an elongate silicon base portion with one or more contact areas (12) formed at one end and a diaphragm (13) formed at the opposite distal end. A plurality of piezoresistive elements (14) are provided on the diaphragm, preferably in a Wheatstone Bridge arrangement, and connected to the contact areas using interconnects (15). The diaphragm extends across substantially the entire effective width of the elongate base portion providing a compact width whilst still maintaining a sensitive pressure sensing capability.