METHOD FOR PACKAGING SEMICONDUCTORS AT A WAFER LEVEL

摘要

A method for packaging a plurality of semiconductor devices formed in a surface portion of a semiconductor wafer. The method includes: lithographically forming in a material disposed on the surface portion of the semiconductor wafer device-exposing openings to exposed the devices and electrical contacts pads openings to expose electrical contact pads for devices; mounting a rigid dielectric layer over the formed material, such rigid material being suspended over the device exposing openings in the material and over the electrical contacts pads openings in the material; and forming electrical contact pad openings in portions of the rigid dielectric layer disposed over electrical contact pads of the devices with other portions of the rigid dielectric layer remaining suspended over the device exposing openings in the material.