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发明名称
REDUCTION OF ATTRACTION FORCES BETWEEN SILICON WAFERS
摘要
申请公布号
EP1926580(B1)
申请公布日期
2010.03.24
申请号
EP20060757883
申请日期
2006.06.26
申请人
REC SCANWAFER AS
发明人
SAUAR, ERIK;WANG, PER ARNE
分类号
B28D5/00;B23D57/00;H01L21/00
主分类号
B28D5/00
代理机构
代理人
主权项
地址
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