发明名称 Method of reducing a divergence of a laser beam
摘要 <p>A laser comprising at least one active medium and a plurality of optical elements is provided. At least some of the optical elements form at least one resonator. An alteration of one of the plurality of optical elements is determined, wherein the alteration is adapted to reduce a distortion of a wavefront of light emitted by the laser. At least one portion of the one of the optical elements is removed to change a shape of the one of the optical elements on the basis of the determined alteration. Thus, a divergence of a laser beam emitted by the laser can be reduced.</p>
申请公布号 EP2166626(A1) 申请公布日期 2010.03.24
申请号 EP20080016395 申请日期 2008.09.17
申请人 CARL ZEISS SMT AG 发明人 HOLDERER, HUBERT;TAYEBATI, PAYAM
分类号 H01S3/00;H01S3/034;H01S3/225;H01S3/23 主分类号 H01S3/00
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