发明名称 PROCESS FOR PRODUCTION OF CARBON NANOTUBE AGGREGATES, CARBON NANOTUBE AGGREGATES, CATALYST PARTICLE DISPERSION MEMBRANE, ELECTRON EMITTERS, AND FIELD EMISSION DISPLAYS
摘要 A method for producing a carbon nanotube assembly, the method controlling a growth density of carbon nanotubes on a substrate, includes: a step for preparing a catalyst particle dispersed film-formed substrate including a catalyst particle dispersed film in which metal catalyst particles having a predetermined particle diameter are dispersed among barrier particles; and a thermal CVD step for growing carbon nanotubes from the metal catalyst particles serving as starting points by heat decomposition of an organic compound vapor.
申请公布号 EP1995213(A4) 申请公布日期 2010.03.24
申请号 EP20070738373 申请日期 2007.03.13
申请人 NIKON CORPORATION 发明人 TAKI, YUSUKE;SHINOHARA, KIYOAKI;KIKUCHI, MAKIKO
分类号 C01B31/02;B01J21/18;B01J23/85;B01J35/02;B82B1/00;B82B3/00;H01J1/30;H01J31/12 主分类号 C01B31/02
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