发明名称 |
PROCESS FOR PRODUCTION OF CARBON NANOTUBE AGGREGATES, CARBON NANOTUBE AGGREGATES, CATALYST PARTICLE DISPERSION MEMBRANE, ELECTRON EMITTERS, AND FIELD EMISSION DISPLAYS |
摘要 |
A method for producing a carbon nanotube assembly, the method controlling a growth density of carbon nanotubes on a substrate, includes: a step for preparing a catalyst particle dispersed film-formed substrate including a catalyst particle dispersed film in which metal catalyst particles having a predetermined particle diameter are dispersed among barrier particles; and a thermal CVD step for growing carbon nanotubes from the metal catalyst particles serving as starting points by heat decomposition of an organic compound vapor. |
申请公布号 |
EP1995213(A4) |
申请公布日期 |
2010.03.24 |
申请号 |
EP20070738373 |
申请日期 |
2007.03.13 |
申请人 |
NIKON CORPORATION |
发明人 |
TAKI, YUSUKE;SHINOHARA, KIYOAKI;KIKUCHI, MAKIKO |
分类号 |
C01B31/02;B01J21/18;B01J23/85;B01J35/02;B82B1/00;B82B3/00;H01J1/30;H01J31/12 |
主分类号 |
C01B31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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