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发明名称
FILM FORMING APPARATUS, FILM FORMING SYSTEM, FILM FORMING METHOD, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE OR ORGANIC ELECTROLUMINESCENCE ELEMENT
摘要
申请公布号
EP1932937(A4)
申请公布日期
2010.03.24
申请号
EP20060783187
申请日期
2006.09.05
申请人
TOHOKU UNIVERSITY;TOKYO ELECTRON LIMITED
发明人
OHMI, TADAHIRO;MATSUOKA, TAKAAKI;NAKAYAMA, SHOZO;ITO, HIRONORI
分类号
C23C14/24;C23C14/12;H01L51/50;H05B33/10
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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