WAFER SCALE HIGH DENSITY PROBE ASSEMBLY, APPARATUS FOR USE THEREOF AND METHODS OF FABRICATION THEREOF,申请号EP19970941593-传众专利搜索

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发明名称	WAFER SCALE HIGH DENSITY PROBE ASSEMBLY, APPARATUS FOR USE THEREOF AND METHODS OF FABRICATION THEREOF
摘要
申请公布号	EP0925513(B1)	申请公布日期	2010.03.24
申请号	EP19970941593	申请日期	1997.09.12
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	BEAMAN, BRIAN, SAMUEL;FOGEL, KEITH, EDWARD;LAURO, PAUL ALFRED;SHIH, DA-YUAN
分类号	G01R31/26;G01R31/316;G01R1/067;G01R1/073;G01R3/00;H01L21/66	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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