发明名称 |
Electrode cartridge and a system for measuring an internal stress for a film of plating |
摘要 |
The electrode cartridge for measuring an internal stress of a film of plating includes a cathode support, an anode support, a shield plate and an anode shell. The anode support supports an anode plate so that the anode plate is opposite to the cathode plate with a predetermined spacing. The shield plate is interposed between the cathode and anode plates. A through hole is made in the shield plate in such a manner that the through hole confronts a plating section and has a geometry which is reduced by a first predetermined scale factor relative to a geometry of the plating section. An opening is made in the anode shell in such a manner that the opening confronts the plating section and has a geometry which is magnified by a second predetermined scale factor relative to the geometry of the plating section.
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申请公布号 |
US7682493(B2) |
申请公布日期 |
2010.03.23 |
申请号 |
US20050049304 |
申请日期 |
2005.02.03 |
申请人 |
YAMAMOTO-MS CO., LTD. |
发明人 |
YAMAMOTO WATARU;AKIYAMA KATSUNORI;HARADA FUMIO;TSURU YUTAKA |
分类号 |
B23H3/04;G01L1/00;C25D21/12;G01L1/22 |
主分类号 |
B23H3/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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