MENUFACTURING METHOD OF PROBE ASSEMBLY HAVING PLURAL ROW

摘要

PURPOSE: A manufacturing method of a probe assembly having plural row is provided to produce a probe assembly which can contact a plurality of pads at the same time. CONSTITUTION: A photoresist pattern is formed on a first substrate(11) to the form of the first column beam. A set space is formed through the etching of the first substrate. The photoresist is removed. A sacrifice layer for the plating is formed. A second substrate(16) is bonded in the upper part of the first heat beam and the first substrate. A lower face of the first substrate is flattened.