| 摘要 |
A calculation processing unit controls temperature of a Peltier device based on a slope of a waveform obtained by subtracting a waveform of a B-arm monitoring signal from a waveform of an A-arm monitoring signal and a value obtained by subtracting a value B of the B-arm monitoring signal from a value A of the A-arm monitoring signal. Similarly, the calculation processing unit controls a phase of the A-arm and a phase of the B-arm. An A-arm side micro-controller controls temperature of an A-arm side heater 22 based on the value of the A-arm monitoring signal, and controls the phase of the A-arm. A B-arm side micro-controller controls temperature of a B-arm side heater based on the value B of the B-arm monitoring signal, and controls the phase of the B-arm.
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