发明名称 Semiconductor device having a pole-shaped portion and method of fabricating the same
摘要 A semiconductor device according to an embodiment of the present invention includes: a square pole-shaped channel portion made from a first semiconductor layer formed on a substrate, and surrounded with four side faces; a gate electrode formed on a first side face of the channel portion, and a second side face of the channel portion opposite to the first side face through respective gate insulating films; a source region having a conductivity type different from that of the channel portion and being formed on a third side face of the channel portion, the source region including a second semiconductor layer having a lattice constant different from that of the first semiconductor layer and being formed directly on the substrate; and a drain region having a conductivity type different from that of the channel portion and being formed on a fourth side face of the channel portion opposite to the third side face, the drain region including the second semiconductor layer being formed directly on the substrate.
申请公布号 US7683436(B2) 申请公布日期 2010.03.23
申请号 US20070790517 申请日期 2007.04.26
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 NISHIYAMA NOBUYASU;YAHASHI KATSUNORI
分类号 H01L29/76;H01L29/94;H01L31/062;H01L31/113;H01L31/119 主分类号 H01L29/76
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