发明名称 Semiconductor device fabrication method
摘要 A semiconductor device fabricating method includes forming a thin film at a top surface of a substrate; polishing a back surface of said substrate; and after the polishing of the back surface, polishing said thin film as formed at the top surface of said substrate.
申请公布号 US7682975(B2) 申请公布日期 2010.03.23
申请号 US20060472462 申请日期 2006.06.22
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 FUKUSHIMA DAI;MINAMIHABA GAKU;YANO HIROYUKI
分类号 H01L21/461;H01L21/4763 主分类号 H01L21/461
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