Fiber optic seismic sensor based on MEMS cantilever

摘要

A dual cantilevered beam structure is attached to a silicon frame. An optical fiber extends from a borosilicate wafer bonded to the bottom of the frame. A second borosilicate wafer is bonded to the top of the frame. The bottom borosilicate wafer is bonded to the optical fiber with a bonding agent having an index of refraction between the refractive index of the fused silica optical fiber and the refractive index of the borosilicate wafer. In an embodiment, the bonding agent has a refractive index substantially similar to optical cement. Light is reflected into the optical fiber from the beam structure for measuring seismic changes.